An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode

The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model exists for understanding the mechanics and limits of the collapse mode. In this...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 7 vom: 15. Juli, Seite 1468-77
1. Verfasser: Olcum, Selim (VerfasserIn)
Weitere Verfasser: Yamaner, F Yalcin, Bozkurt, Ayhan, Köymen, Hayrettin, Atalar, Abdullah
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2011
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, Non-U.S. Gov't