Sputtered SiO2 as low acoustic impedance material for Bragg mirror fabrication in BAW resonators

von Olivares, Jimena
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)

Circuital model for the analysis of the piezoelectric response of A1N films using SAW filters

von Iborra, Enrique
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2007)

Effect of particle bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices

von Iborra, Enrique
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2004)