Circuital model for the analysis of the piezoelectric response of A1N films using SAW filters
In this paper we describe a method to assess the piezoelectric response of a piezoelectric thin film deposited on a conductive substrate. It is based on analyzing the frequency response of a surface acoustic wave (SAW) filter made on the piezoelectric thin film. For this analysis, we use a circuital...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 54(2007), 11 vom: 07. Nov., Seite 2367-75 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2007
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |