Journal Article epitaxy Fano resonances Ge/SiGe heterostructures SWIR sensing Silicon Spin qubit Z4152N8IUI antimonene atom probe tomography coherent X-ray diffraction Imaging graphene group-IV semiconductors in situ microscopy isotopically enriched semiconductors light-hole sub-bands low-dimensional systems metasurfaces nanowire nuclear spin polarization tunability silicon germanium tin semiconductors silicon-integrated quantum structures silicon-on-Insulator strain ultrathin layer van der Waals heterostructures