Neutron reflectivity characterization of the photoacid reaction-diffusion latent and developed images of molecular resists for extreme ultraviolet lithography

von Prabhu, Vivek M
Veröffentlicht in: Langmuir : the ACS journal of surfaces and colloids (2012)

Photoresist latent and developer images as probed by neutron reflectivity methods

von Prabhu, Vivek M
Veröffentlicht in: Advanced materials (Deerfield Beach, Fla.) (2011)

Effect of deprotection extent on swelling and dissolution regimes of thin polymer films

von Rao, Ashwin
Veröffentlicht in: Langmuir : the ACS journal of surfaces and colloids (2006)