Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry

von Mattinen, Miika
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2022)

Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution

von Balasubramanyam, Shashank
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2019)

Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition

von Basuvalingam, Saravana Balaji
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2019)

Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation

von Singh, Joseph A
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2018)

Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization

von Vervuurt, René H J
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2017)