Journal Article 4 UV lithography 2 172 nm-excimer UV lithography 1 Electrolytes 1 Plastics 1 Polymers 1 Polystyrenes 1 mehr ... Research Support, Non-U.S. Gov't 1 actuators 1 all-polymer electrochemical transistors 1 deep UV lithography 1 device fabrication 1 high device density 1 imprinting 1 laser fabrication 1 light-driven actuators 1 metal-organic frameworks 1 micropatterning 1 microstructures 1 object identification 1 patterning 1 photothermal effect 1 polystyrene 1 tactile-gustatory receptors 1 tissue culture 1 weniger ...