A Miniature Photoacoustic Sensing System with Advanced PMUT and VCSEL Devices
This study presents a high-fill-factor piezoelectric micromachined ultrasonic transducer (PMUT) array fabricated via the cavity silicon-on-insulator (CSOI) process. The center frequency of the PMUT is 4.89 MHz in air and 3.5 MHz in a gel-type couplant, along with a -6 dB photoacoustic (PA) bandwidth...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - PP(2025) vom: 01. Okt.
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| Auteur principal: |
Fang, Yexing
(Auteur) |
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| Autres auteurs: |
Bao, Aocheng,
Shi, Zihao,
Gan, Jinghan,
Sheng, Bowen,
Zhang, Haixia,
Lu, Yipeng |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2025
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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