Study on Loss Mechanisms in SAW Resonators Using 42-LT Thin Plate by Full-3-D FEM With Hierarchical Cascading Technique
This article describes the study of loss mechanisms in an incredible high-performance surface acoustic wave (IHP SAW) resonator on the 42°YX-LiTaO3/SiO2/Si structure. The full 3-D finite element method (FEM) is applied with the assistance of the hierarchical cascading technique (HCT). Excellent agre...
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Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 72(2025), 4 vom: 23. Apr., Seite 539-546
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| 1. Verfasser: |
Liu, Yiming
(VerfasserIn) |
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| Weitere Verfasser: |
He, Yiwen,
Yang, Zijiang,
Li, Fangyi,
Bao, Jingfu,
Hashimoto, Ken-Ya |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2025
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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