Ion velocities in the presheath of electronegative, radio-frequency plasmas measured by low-energy cutoff
Simple kinematic considerations indicate that, under certain conditions in radio-frequency (rf) plasmas, the amplitude of the low-energy peak in ion energy distributions (IEDs) measured at an electrode depends sensitively on ion velocities upstream, at the presheath/sheath boundary. By measuring thi...
| Veröffentlicht in: | Applied physics letters. - 1998. - 109(2016), 2 vom: 27. |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2016
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| Zugriff auf das übergeordnete Werk: | Applied physics letters |
| Schlagworte: | Journal Article |
| Online verfügbar |
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