Design Rules for Capillary Force-Induced Clustering and Recovery of Monolithic Microbridges on Microapertured Polymer Membrane

Microbridge structures have been widely used in microelectromechanical systems. When the devices with microbridges operate in diverse environments, including wet conditions, structural failures such as crumples, clustering, and collapse of micro/nanostructures occur due to the capillary force of liq...

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Veröffentlicht in:	Langmuir : the ACS journal of surfaces and colloids. - 1999. - 40(2024), 39 vom: 01. Okt., Seite 20333-20341
1. Verfasser:	Seol, Changwook (VerfasserIn)
Weitere Verfasser:	Lee, Sang Hyun, Jang, Segeun, Kim, Sang Moon
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2024
Zugriff auf das übergeordnete Werk:	Langmuir : the ACS journal of surfaces and colloids
Schlagworte:	Journal Article