Analysis and Guideline for Determining Piezoelectric Coefficient for Films With Substrate Constraint
Piezoelectric films including coatings are widely employed in various electromechanical devices. Precise measurement for piezoelectric film properties is crucial for both piezoelectric material development and design of the piezoelectric devices. However, substrate constraint on the deformation of p...
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Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 71(2024), 10 vom: 10. Okt., Seite 1335-1344
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| 1. Verfasser: |
Xu, Qinwen
(VerfasserIn) |
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| Weitere Verfasser: |
Zhou, Jie,
Acharya, Shashidhara,
Chai, Jianwei,
Zhang, Mingsheng,
Sun, Chengliang,
Yao, Kui |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2024
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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