Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces : Insights from ReaxFF Molecular Dynamics
Fully understanding the anisotropic effect of silicon surface orientations in local anodic oxidation (LAO) nanolithography processes is critical to the precise control of oxide quality and rate. This study used ReaxFF MD simulations to reveal the surface anisotropic effects in the LAO through the an...
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - (2024) vom: 15. Juli |
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Weitere Verfasser: | , , , |
Format: | Online-Aufsatz |
Sprache: | English |
Veröffentlicht: |
2024
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
Schlagworte: | Journal Article |
Online verfügbar |
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