Fast nanoscale imaging of strain in a multi-segment heterostructured nanowire with 2D Bragg ptychography
© Susanna Hammarberg et al. 2024.
| Publié dans: | Journal of applied crystallography. - 1998. - 57(2024), Pt 1 vom: 01. Feb., Seite 60-70 |
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| Auteur principal: | |
| Autres auteurs: | , , , , , |
| Format: | Article en ligne |
| Langue: | English |
| Publié: |
2024
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| Accès à la collection: | Journal of applied crystallography |
| Sujets: | Journal Article Bragg projection ptychography III–V materials X-ray imaging nanowires |
| Résumé: | © Susanna Hammarberg et al. 2024. Developing semiconductor devices requires a fast and reliable source of strain information with high spatial resolution and strain sensitivity. This work investigates the strain in an axially heterostructured 180 nm-diameter GaInP nanowire with InP segments of varying lengths down to 9 nm, simultaneously probing both materials. Scanning X-ray diffraction (XRD) is compared with Bragg projection ptychography (BPP), a fast single-projection method. BPP offers a sufficient spatial resolution to reveal fine details within the largest segments, unlike scanning XRD. The spatial resolution affects the quantitative accuracy of the strain maps, where BPP shows much-improved agreement with an elastic 3D finite element model compared with scanning XRD. The sensitivity of BPP to small deviations from the Bragg condition is systematically investigated. The experimental confirmation of the model suggests that the large lattice mismatch of 1.52% is accommodated without defects |
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| Description: | Date Revised 10.02.2024 published: Electronic-eCollection Citation Status PubMed-not-MEDLINE |
| ISSN: | 0021-8898 |
| DOI: | 10.1107/S1600576723010403 |