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231226s2024 xx |||||o 00| ||eng c |
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|a 10.1109/TUFFC.2023.3342011
|2 doi
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|a pubmed25n1218.xml
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|a (DE-627)NLM365815802
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|a (NLM)38090855
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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1 |
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|a Annayev, Muhammetgeldi
|e verfasserin
|4 aut
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| 245 |
1 |
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|a Design and Fabrication of 1-D CMUT Arrays for Dual-Mode Dual-Frequency Acoustic Angiography Applications
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|c 2024
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| 336 |
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
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|2 rdacarrier
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|a Date Revised 02.02.2024
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a When microbubble contrast agents are excited at low frequencies (less than 5 MHz), they resonate and produce higher-order harmonics due to their nonlinear behavior. We propose a novel scheme with a capacitive micromachined ultrasonic transducer (CMUT) array to receive high-frequency microbubble harmonics in collapse mode and to transmit a low-frequency high-pressure pulse by releasing the CMUT plate from collapse and pull it back to collapse again in the same transmit-receive cycle. By patterning and etching the substrate to create glass spacers in the device cavity we can reliably operate the CMUT in collapse mode and receive high-frequency signals. Previously, we demonstrated a single-element CMUT with spacers operating in the described fashion. In this article, we present the design and fabrication of a dual-mode, dual-frequency 1-D CMUT array with 256 elements. We present two different insulating glass spacer designs in rectangular cells for the collapse mode. For the device with torus-shaped spacers, the 3 dB receive bandwidth is from 8 to 17 MHz, and the transmitted maximum peak-to-peak pressure from 32 elements at 4 mm focal depth was 2.12 MPa with a 1.21 MPa peak negative pressure, which corresponds to a mechanical index (MI) of 0.58 at 4.3 MHz. For the device with line-shaped spacers, the 3-dB receive bandwidth at 150 V dc bias extends from 10.9 to 19.2 MHz. By increasing the bias voltage to 180 V, the 3 dB bandwidth shifts, and extends from 11.7 to 20.4 MHz. The transmitting maximum peak-to-peak pressure with 32 elements at 4 mm was 2.06 MPa with a peak negative pressure of 1.19 MPa, which corresponds to an MI of 0.62 at 3.7 MHz
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|a Journal Article
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1 |
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|a Minhaj, Tamzid Ibn
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Adelegan, Oluwafemi J
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Yamaner, Feysel Yalcin
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Dayton, Paul A
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Oralkan, Omer
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 71(2024), 1 vom: 13. Jan., Seite 191-201
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnas
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| 773 |
1 |
8 |
|g volume:71
|g year:2024
|g number:1
|g day:13
|g month:01
|g pages:191-201
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|u http://dx.doi.org/10.1109/TUFFC.2023.3342011
|3 Volltext
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