Exploring the Surface Oxidation and Environmental Instability of 2H-/1T'-MoTe2 Using Field Emission-Based Scanning Probe Lithography
© 2023 The Authors. Advanced Materials published by Wiley-VCH GmbH.
| Veröffentlicht in: | Advanced materials (Deerfield Beach, Fla.). - 1998. - 36(2024), 4 vom: 15. Jan., Seite e2310887 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2024
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| Zugriff auf das übergeordnete Werk: | Advanced materials (Deerfield Beach, Fla.) |
| Schlagworte: | Journal Article 2D materials Fowler-Nordheim field emission nanolithography transition metal dichalcogenide |
| Zusammenfassung: | © 2023 The Authors. Advanced Materials published by Wiley-VCH GmbH. An unconventional approach for the resistless nanopatterning 2H- and 1T'-MoTe2 by means of scanning probe lithography is presented. A Fowler-Nordheim tunneling current of low energetic electrons (E = 30-60 eV) emitted from the tip of an atomic force microscopy (AFM) cantilever is utilized to induce a nanoscale oxidation on a MoTe2 nanosheet surface under ambient conditions. Due to the water solubility of the generated oxide, a direct pattern transfer into the MoTe2 surface can be achieved by a simple immersion of the sample in deionized water. The tip-grown oxide is characterized using Auger electron and Raman spectroscopy, revealing it consists of amorphous MoO3 /MoOx as well as TeO2 /TeOx . With the presented technology in combination with subsequent AFM imaging it is possible to demonstrate a strong anisotropic sensitivity of 1T'-/(Td )-MoTe2 to aqueous environments. Finally the discussed approach is used to structure a nanoribbon field effect transistor out of a few-layer 2H-MoTe2 nanosheet |
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| Beschreibung: | Date Revised 25.01.2024 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
| ISSN: | 1521-4095 |
| DOI: | 10.1002/adma.202310887 |