Harnessing Acoustic Dispersions in YX-LN/SiO2/Si SH-SAW Resonators for Electromechanical Coupling Optimization and Rayleigh Mode Suppression
In this study, we investigate the dispersive behavior of the electromechanical coupling coefficient ( [Formula: see text]) for shear-horizontal (SH) and Rayleigh surface acoustic wave (SAW) modes in a YX-LiNbO3 (LN)/SiO2/Si substrate across various wavelengths. Due to the difference in velocity disp...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 12 vom: 02. Dez., Seite 1786-1793
|
|---|
| 1. Verfasser: |
Hsu, Tzu-Hsuan
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Lee, Zhi-Qiang,
Tsai, Chia-Hsien,
Lin, Cheng-Chien,
Yu, Ya-Ching,
Li, Ming-Huang |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2023
|
|---|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Schlagworte: | Journal Article |
|---|