Harnessing Acoustic Dispersions in YX-LN/SiO2/Si SH-SAW Resonators for Electromechanical Coupling Optimization and Rayleigh Mode Suppression
In this study, we investigate the dispersive behavior of the electromechanical coupling coefficient ( [Formula: see text]) for shear-horizontal (SH) and Rayleigh surface acoustic wave (SAW) modes in a YX-LiNbO3 (LN)/SiO2/Si substrate across various wavelengths. Due to the difference in velocity disp...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 12 vom: 02. Dez., Seite 1786-1793
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| Auteur principal: |
Hsu, Tzu-Hsuan
(Auteur) |
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| Autres auteurs: |
Lee, Zhi-Qiang,
Tsai, Chia-Hsien,
Lin, Cheng-Chien,
Yu, Ya-Ching,
Li, Ming-Huang |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2023
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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