Micropatterned Fluororubber-Based Dry Adhesive for Pan-Semiconductor Production Line with Complicated Operating Conditions
The efficient and safe manipulation of precision materials (such as thin and fragile wafers and glass substrates for flat panel displays) under complicated operating conditions with vacuum, high temperature, and low preload stress is an essential task for pan-semiconductor production lines. However,...
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Détails bibliographiques
| Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 39(2023), 40 vom: 10. Okt., Seite 14474-14486
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| Auteur principal: |
Li, Shuai
(Auteur) |
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| Autres auteurs: |
Tian, Hongmiao,
Fan, Yu,
Wang, Chunhui,
Li, Xiangming,
Chen, Xiaoliang,
Shao, Jinyou |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2023
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| Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids
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| Sujets: | Journal Article |
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