Micromachining of High-Quality PMN-PT/Epoxy 1-3 Composite for High-Frequency (>30 MHz) Ultrasonic Transducer Applications

Fabricating PMN-PT composites, the core component of high-frequency (> 30 MHz) transducers, remains challenging due to their poor machinability and ultrasmall kerfs. This urgent problem is significantly impeding the development of PMN-PT ultrasonic transducers for use in clinical research, biomed...

Ausführliche Beschreibung

Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 11 vom: 29. Nov., Seite 1563-1573
1. Verfasser: Lei, Zhihong (VerfasserIn)
Weitere Verfasser: Xu, Guisheng, Liu, Jinfeng, Liu, Youjian, Ji, Xuanrong
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2023
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article
LEADER 01000naa a22002652 4500
001 NLM362700885
003 DE-627
005 20231226091759.0
007 cr uuu---uuuuu
008 231226s2023 xx |||||o 00| ||eng c
024 7 |a 10.1109/TUFFC.2023.3320652  |2 doi 
028 5 2 |a pubmed24n1208.xml 
035 |a (DE-627)NLM362700885 
035 |a (NLM)37773915 
040 |a DE-627  |b ger  |c DE-627  |e rakwb 
041 |a eng 
100 1 |a Lei, Zhihong  |e verfasserin  |4 aut 
245 1 0 |a Micromachining of High-Quality PMN-PT/Epoxy 1-3 Composite for High-Frequency (>30 MHz) Ultrasonic Transducer Applications 
264 1 |c 2023 
336 |a Text  |b txt  |2 rdacontent 
337 |a ƒaComputermedien  |b c  |2 rdamedia 
338 |a ƒa Online-Ressource  |b cr  |2 rdacarrier 
500 |a Date Revised 02.11.2023 
500 |a published: Print-Electronic 
500 |a Citation Status PubMed-not-MEDLINE 
520 |a Fabricating PMN-PT composites, the core component of high-frequency (> 30 MHz) transducers, remains challenging due to their poor machinability and ultrasmall kerfs. This urgent problem is significantly impeding the development of PMN-PT ultrasonic transducers for use in clinical research, biomedical sciences, and nondestructive testing (NDT). In this study, high-quality PMN-0.3PT/epoxy 1-3 composites at 30 and 50 MHz were manufactured using a modified picosecond (1.5 ps) laser technique. Their performance was thoroughly analyzed, which was comparable to that with low-stress dry plasma etching. There were fewer microcracks around PMN-PT pillars. The minimum kerf was less than [Formula: see text], and the highest aspect ratio was larger than 7.5. The microdomain morphology and hysteresis loops of PMN-PT pillars further confirmed that composites still maintained excellent piezoelectric performance and suffered fewer damages during laser cutting. The characterization results exhibited a large electromechanical coupling (>0.77), a high dielectric constant (>1600), and a relatively low acoustic impedance (< 17 Mrayls). The ultrasonic transducers with center frequencies of 30 and 50 MHz were designed and prototyped to validate the performance of composites. The transducers showed broad bandwidth (>80%), high two-way insertion loss (IL) (>-23 dB), and imaging resolution superior to [Formula: see text]. Finally, the C-scan experiments of IC chips were also used to further illustrate the applicability of transducers. These encouraging results further demonstrated that ultrafast laser technology will bring more accessible and affordable methods for fabricating high-frequency PMN-PT composite transducers with excellent performance 
650 4 |a Journal Article 
700 1 |a Xu, Guisheng  |e verfasserin  |4 aut 
700 1 |a Liu, Jinfeng  |e verfasserin  |4 aut 
700 1 |a Liu, Youjian  |e verfasserin  |4 aut 
700 1 |a Ji, Xuanrong  |e verfasserin  |4 aut 
773 0 8 |i Enthalten in  |t IEEE transactions on ultrasonics, ferroelectrics, and frequency control  |d 1986  |g 70(2023), 11 vom: 29. Nov., Seite 1563-1573  |w (DE-627)NLM098181017  |x 1525-8955  |7 nnns 
773 1 8 |g volume:70  |g year:2023  |g number:11  |g day:29  |g month:11  |g pages:1563-1573 
856 4 0 |u http://dx.doi.org/10.1109/TUFFC.2023.3320652  |3 Volltext 
912 |a GBV_USEFLAG_A 
912 |a SYSFLAG_A 
912 |a GBV_NLM 
912 |a GBV_ILN_22 
912 |a GBV_ILN_24 
912 |a GBV_ILN_350 
951 |a AR 
952 |d 70  |j 2023  |e 11  |b 29  |c 11  |h 1563-1573