Five Low-Noise Stable Oscillators Referenced to the Same Multimode AlN/Si MEMS Resonator
We report on the first experimental demonstration of five self-sustaining feedback oscillators referenced to a single multimode resonator, using piezoelectric aluminum nitride on silicon (AlN/Si) microelectromechanical systems (MEMS) technology. Integrated piezoelectric transduction enables efficien...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 10 vom: 19. Okt., Seite 1213-1228
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| Auteur principal: |
Kaisar, Tahmid
(Auteur) |
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| Autres auteurs: |
Yousuf, S M Enamul Hoque,
Lee, Jaesung,
Qamar, Afzaal,
Rais-Zadeh, Mina,
Mandal, Soumyajit,
Feng, Philip X-L |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2023
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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