Native Silicon Oxide Properties Determined by Doping
The physico-chemical properties of native oxide layers, spontaneously forming on crystalline Si wafers in air, can be strictly correlated to the dopant type and doping level. In particular, our investigations focused on oxide layers formed upon air exposure in a clean room after Si wafer production,...
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Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 39(2023), 35 vom: 05. Sept., Seite 12430-12451
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| 1. Verfasser: |
Della Ciana, Michele
(VerfasserIn) |
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| Weitere Verfasser: |
Kovtun, Alessandro,
Summonte, Caterina,
Candini, Andrea,
Cavalcoli, Daniela,
Gentili, Denis,
Nipoti, Roberta,
Albonetti, Cristiano |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2023
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article |
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