Deposition of Nanostructured Tungsten Oxide Layers by a New Method : Periodic Modulation of the Deposition Angle
Periodic modulation of the deposition angle (PMDA) is a new method to deposit nanostructured and continuous layers with controllable periodic density fluctuation. The method is used for the magnetron sputtering of a WO3 layer for an electrochromic device (ECD). An experimental study indicates that t...
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Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1999. - 39(2023), 35 vom: 05. Sept., Seite 12336-12345
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| 1. Verfasser: |
Sychov, Maxim
(VerfasserIn) |
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| Weitere Verfasser: |
Eruzin, Alexander,
Semenova, Anna,
Katashev, Pavel,
Mjakin, Sergey,
Zhukov, Mikhail V,
Aglikov, Aleksandr,
Nosonovsky, Michael,
Skorb, Ekaterina V |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2023
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article |
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