Molecular Lithography on Silicon Wafers Guided by Porous, Extended Arrays of Small DNA Tiles

Tile-based DNA self-assembly is a cost-effective fabrication method for large-scale nanopatterns. Herein, we report a protocol to directly assemble DNA 2D arrays on silicon wafers and then use the DNA nanostructures as molds to fabricate the corresponding nanostructures on the silicon wafers by hydr...

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Bibliographische Detailangaben
Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 39(2023), 33 vom: 22. Aug., Seite 11782-11787
1. Verfasser: Mao, Dake (VerfasserIn)
Weitere Verfasser: Liu, Longfei, Zhang, Cuizheng, Liu, Haitao, Mao, Chengde
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2023
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article Research Support, U.S. Gov't, Non-P.H.S. Silicon Z4152N8IUI DNA 9007-49-2