Spurious Modes in Laterally Excited Bulk Acoustic Resonators (XBARs) : Analysis and Suppression
Laterally excited bulk acoustic resonators (XBARs) are plate mode resonators in which one of the higher-order plate modes transforms into the bulk acoustic wave (BAW) due to the very thin plates used in these devices. The propagation of the primary mode is usually accompanied by numerous spurious mo...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 6 vom: 09. Juni, Seite 569-576 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2023
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |
| Online verfügbar |
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