Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors
Surface acoustic wave (SAW) resonators based on aluminum nitride (AlN)/scandium-doped AlN (ScAlN) composite thin films with dual reflection structures demonstrate substantial improvement in acoustic performance. In this work, the factors affecting the final electrical performance of SAW are analyzed...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 10 vom: 22. Okt., Seite 1239-1245
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| Auteur principal: |
Liu, Yan
(Auteur) |
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| Autres auteurs: |
Lin, Binghui,
Xie, Ying,
Soon, Bo Woon,
Cai, Yao,
He, Jun,
Sun, Chengliang |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2023
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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