Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors
Surface acoustic wave (SAW) resonators based on aluminum nitride (AlN)/scandium-doped AlN (ScAlN) composite thin films with dual reflection structures demonstrate substantial improvement in acoustic performance. In this work, the factors affecting the final electrical performance of SAW are analyzed...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 10 vom: 22. Okt., Seite 1239-1245
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| 1. Verfasser: |
Liu, Yan
(VerfasserIn) |
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| Weitere Verfasser: |
Lin, Binghui,
Xie, Ying,
Soon, Bo Woon,
Cai, Yao,
He, Jun,
Sun, Chengliang |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2023
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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