Extending the Linearity of AlScN Contour-Mode Resonators Through Acoustic Metamaterials-Based Reflectors
This work describes the implementation of acoustic metamaterials (AMs) made of a forest of rods at the sides of a suspended aluminum scandium nitride (AlScN) contour-mode resonator (CMR) to increase its power handling without causing degradations of its electromechanical performance. The increase in...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 70(2023), 10 vom: 04. Okt., Seite 1229-1238
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| 1. Verfasser: |
Zhao, Xuanyi
(VerfasserIn) |
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| Weitere Verfasser: |
Kaya, Onurcan,
Pirro, Michele,
Simeoni, Pietro,
Segovia-Fernandez, Jeronimo,
Cassella, Cristian |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2023
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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