Super-High-Frequency Low-Loss Sezawa Mode SAW Devices in a GaN/SiC Platform

This paper presents a comprehensive study of the performance of Sezawa surface acoustic wave (SAW) devices in SweGaN QuanFINE® ultrathin GaN/SiC platform, reaching frequencies above 14 GHz for the first time. Sezawa mode frequency scaling is achieved due to the elimination of the thick buffer layer...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - PP(2023) vom: 02. Feb.
1. Verfasser: Ahmed, Imtiaz (VerfasserIn)
Weitere Verfasser: Rawat, Udit, Chen, Jr-Tai, Weinstein, Dana
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2023
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article