Extreme UV Resist Exhibiting Synergism between Chemical and Physical Crosslinking Mechanisms
Carbon-fluorine bonds in fluorinated molecules can undergo homolytic cleavage reactions when electrons are injected, and the resulting radicals combine to form network structures characterized by reduced solubility. This crosslinking chemistry suggests a new category of patterning materials that fun...
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Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 39(2023), 9 vom: 07. März, Seite 3462-3470
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| 1. Verfasser: |
Ku, Yejin
(VerfasserIn) |
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| Weitere Verfasser: |
Kim, KangHyun,
Oh, Hyun-Taek,
Park, Byeong-Gyu,
Lee, Sangsul,
Lee, Jin-Kyun,
Koh, Chawon,
Nishi, Tsunehiro,
Kim, Hyun-Woo |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2023
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article |
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