APA Zitierstil

D'Acunto, G., Tsyshevsky, R., Shayesteh, P., Gallet, J., Bournel, F., Rochet, F., . . . Schnadt, J. (2023). Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO2. Chemistry of materials : a publication of the American Chemical Society, 35(2), 529. https://doi.org/10.1021/acs.chemmater.2c02947

Chicago Zitierstil

D'Acunto, Giulio, et al. "Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO2." Chemistry of Materials : A Publication of the American Chemical Society 35, no. 2 (2023): 529. https://dx.doi.org/10.1021/acs.chemmater.2c02947.

MLA Zitierstil

D'Acunto, Giulio, et al. "Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO2." Chemistry of Materials : A Publication of the American Chemical Society, vol. 35, no. 2, 2023, p. 529.