Study on Room-Temperature Wet Oxidation of Silicon Catalyzed by Copper

The anomalously fast growth of the silicon oxide layer at room temperature has been reported for the Cu/Si system. However, the systematical exploration of such a reaction under humidity conditions has not yet been carried out. Through one combination of the experiments and first-principle density f...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 39(2023), 2 vom: 17. Jan., Seite 750-755
1. Verfasser: Liu, Xianhui (VerfasserIn)
Weitere Verfasser: Jia, Lele, Zou, Tongqing, Cai, Chengjie, Liang, Bohao, Xiong, Jinxin, Chao, Jie, Feng, Biao, Yang, Lijun, Li, Shaozhou
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2023
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article