Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator
Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance characteristic in piezoelectric thin film, we theoretically...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 69(2022), 4 vom: Apr., Seite 1452-1460
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| 1. Verfasser: |
Chen, Cong
(VerfasserIn) |
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| Weitere Verfasser: |
Bai, Libing,
Zhang, Jie,
Tian, Lulu,
Zhou, Quan,
Zhou, Hong,
Li, Dongxiao,
Mu, Xiaojing |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2022
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
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