Growth of 2D Materials at the Wafer Scale

© 2022 Wiley-VCH GmbH.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 34(2022), 14 vom: 27. Apr., Seite e2108258
1. Verfasser: Xu, Xiangming (VerfasserIn)
Weitere Verfasser: Guo, Tianchao, Kim, Hyunho, Hota, Mrinal K, Alsaadi, Rajeh S, Lanza, Mario, Zhang, Xixiang, Alshareef, Husam N
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2022
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article Review 2D materials device integration single crystalline van der Waal wafer scale
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520 |a Wafer-scale growth has become a critical bottleneck for scaling up applications of van der Waal (vdW) layered 2D materials in high-end electronics and optoelectronics. Most vdW 2D materials are initially obtained through top-down synthesis methods, such as exfoliation, which can only prepare small flakes on a micrometer scale. Bottom-up growth can enable 2D flake growth over a large area. However, seamless merging of these flakes to form large-area continuous films with well-controlled layer thickness and lattice orientation is still a significant challenge. This review briefly introduces several vdW layered 2D materials covering their lattice structures, representative physical properties, and potential roles in large-scale applications. Then, several methods used to grow vdW layered 2D materials at the wafer scale are reviewed in depth. In particular, three strategies are summarized that enable 2D film growth with a single-crystalline structure over the whole wafer: growth of an isolated domain, growth of unidirectional domains, and conversion of oriented precursors. After that, the progress in using wafer-scale 2D materials in integrated devices and advanced epitaxy is reviewed. Finally, future directions in the growth and scaling of vdW layered 2D materials are discussed 
650 4 |a Journal Article 
650 4 |a Review 
650 4 |a 2D materials 
650 4 |a device integration 
650 4 |a single crystalline 
650 4 |a van der Waal 
650 4 |a wafer scale 
700 1 |a Guo, Tianchao  |e verfasserin  |4 aut 
700 1 |a Kim, Hyunho  |e verfasserin  |4 aut 
700 1 |a Hota, Mrinal K  |e verfasserin  |4 aut 
700 1 |a Alsaadi, Rajeh S  |e verfasserin  |4 aut 
700 1 |a Lanza, Mario  |e verfasserin  |4 aut 
700 1 |a Zhang, Xixiang  |e verfasserin  |4 aut 
700 1 |a Alshareef, Husam N  |e verfasserin  |4 aut 
773 0 8 |i Enthalten in  |t Advanced materials (Deerfield Beach, Fla.)  |d 1998  |g 34(2022), 14 vom: 27. Apr., Seite e2108258  |w (DE-627)NLM098206397  |x 1521-4095  |7 nnns 
773 1 8 |g volume:34  |g year:2022  |g number:14  |g day:27  |g month:04  |g pages:e2108258 
856 4 0 |u http://dx.doi.org/10.1002/adma.202108258  |3 Volltext 
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