Preparation of Ordered Anodic Porous Alumina with Single-Nanometer-Order-Size Holes by Atomic Layer Deposition
Ordered anodic porous alumina with controlled-size holes on the order of a single-nanometer scale was obtained by the atomic layer deposition (ALD) of Al2O3 or TiO2. The thin metal oxide layers of uniform thickness were formed successfully on the inner wall of the hole of the ordered anodic porous a...
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Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1999. - 37(2021), 27 vom: 13. Juli, Seite 8331-8338
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| 1. Verfasser: |
Yanagishita, Takashi
(VerfasserIn) |
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| Weitere Verfasser: |
Otsuka, Masaya,
Takei, Takashi,
Uto, Seigo,
Masuda, Hideki |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2021
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article |
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