Temperature Behavior of SAW Resonators Based on LiNbO₃/Quartz and LiTaO₃/Quartz Substrates
LiNbO3 (LN) or LiTaO3 (LT) thin plates bonded to quartz are novel types of layered substrates for temperature-compensated surface acoustic wave (TCSAW) devices. In SAW resonators with Al electrodes arranged on LT/quartz and LN/quartz substrates, improved temperature behavior due to opposite signs of...
Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 68(2021), 11 vom: 15. Nov., Seite 3430-3437 |
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Format: | Online-Aufsatz |
Sprache: | English |
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2021
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Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
Schlagworte: | Journal Article |
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