Design and Fabrication of Wideband Air-Coupled Capacitive Micromachined Ultrasonic Transducers With Varying Width Annular-Ring and Spiral Cell Structures
Air-coupled transducers with broad bandwidth are desired for many airborne applications, such as obstacle detection, haptic feedback, and flow metering. In this article, we present a design strategy and demonstrate a fabrication process for developing improved concentric annular- and novel spiral-sh...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 68(2021), 8 vom: 27. Aug., Seite 2749-2759
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| 1. Verfasser: |
Adelegan, Oluwafemi Joel
(VerfasserIn) |
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| Weitere Verfasser: |
Coutant, Zachary A,
Wu, Xun,
Yamaner, Feysel Yalcin,
Oralkan, Omer |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2021
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S.
Research Support, Non-U.S. Gov't |
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