Development of a high-precision XYZ translator and estimation of beam profile of the vacuum ultraviolet and soft X-ray undulator beamline BL-13B at the Photon Factory
A high-precision XYZ translator was developed for the microanalysis of electronic structures and chemical compositions on material surfaces by electron spectroscopy techniques, such as photoelectron spectroscopy and absorption spectroscopy, utilizing the vacuum ultraviolet and soft X-ray synchrotron...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 27(2020), Pt 4 vom: 01. Juli, Seite 923-933
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| 1. Verfasser: |
Aiura, Yoshihiro
(VerfasserIn) |
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| Weitere Verfasser: |
Ozawa, Kenichi,
Mase, Kazuhiko,
Minohara, Makoto,
Suzuki, Satoshi |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2020
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
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| Schlagworte: | Journal Article
XYZ manipulator
beamline
microspectroscopy
scanning microscopy |
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