Self-assembly of block copolymers under non-isothermal annealing conditions as revealed by grazing-incidence small-angle X-ray scattering

An accurate knowledge of the parameters governing the kinetics of block copolymer self-assembly is crucial to model the time- and temperature-dependent evolution of pattern formation during annealing as well as to predict the most efficient conditions for the formation of defect-free patterns. Here,...

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Détails bibliographiques
Publié dans:Journal of synchrotron radiation. - 1994. - 27(2020), Pt 5 vom: 01. Sept., Seite 1278-1288
Auteur principal: Fernández-Regúlez, Marta (Auteur)
Autres auteurs: Solano, Eduardo, Evangelio, Laura, Gottlieb, Steven, Pinto-Gómez, Christian, Rius, Gemma, Fraxedas, Jordi, Gutiérrez-Fernández, Edgar, Nogales, Aurora, García-Gutiérrez, Mari Cruz, Ezquerra, Tiberio A, Pérez-Murano, Francesc
Format: Article en ligne
Langue:English
Publié: 2020
Accès à la collection:Journal of synchrotron radiation
Sujets:Journal Article GISAXS block copolymer correlation length kinetics self-assembly
Description
Résumé:An accurate knowledge of the parameters governing the kinetics of block copolymer self-assembly is crucial to model the time- and temperature-dependent evolution of pattern formation during annealing as well as to predict the most efficient conditions for the formation of defect-free patterns. Here, the self-assembly kinetics of a lamellar PS-b-PMMA block copolymer under both isothermal and non-isothermal annealing conditions are investigated by combining grazing-incidence small-angle X-ray scattering (GISAXS) experiments with a novel modelling methodology that accounts for the annealing history of the block copolymer film before it reaches the isothermal regime. Such a model allows conventional studies in isothermal annealing conditions to be extended to the more realistic case of non-isothermal annealing and prediction of the accuracy in the determination of the relevant parameters, namely the correlation length and the growth exponent, which define the kinetics of the self-assembly
Description:Date Revised 03.09.2020
published: Print-Electronic
Citation Status PubMed-not-MEDLINE
ISSN:1600-5775
DOI:10.1107/S1600577520009820