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231225s2020 xx |||||o 00| ||eng c |
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|a 10.1021/acs.langmuir.0c01558
|2 doi
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|a pubmed24n1047.xml
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|a (DE-627)NLM314381090
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|a (NLM)32864972
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|a DE-627
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|e rakwb
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|a eng
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1 |
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|a Wu, Cheng-Tse
|e verfasserin
|4 aut
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|a Microstructured SiOx/COP Stamps for Patterning TiO2 on Polymer Substrates via Microcontact Printing
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|c 2020
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
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|2 rdacarrier
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|a Date Revised 22.09.2020
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a Microcontact printing (μCP) techniques have sparked a surge of interests in microfabrication since they help produce arrays on a wide range of target substrates in a facile and efficient manner. Polydimethylsiloxane (PDMS), as a well-established material for stamps, has constraints resulting from its hydrophobicity and softness, and the replication of PDMS stamps usually requires rigid masters or processes using a photoresist. Herein, a novel μCP stamp based on cyclo-olefin polymer (COP) is produced through vacuum ultraviolet (VUV) lithography. 2,4,6,8-Tetramethylcyclotetrasiloxane is selectively deposited at the affinity-patterns on the COP surface, and these patterned siloxane films are converted into SiOx meanwhile protecting the COP beneath them from the VUV photoetching. By this means, a patterned relief is fabricated on the COP plates, resulting in a hydrophilic SiOx/COP μCP stamp with punch heights of ∼180 nm. The novelty arises from the simplicity of the master- and photoresist-free microstructuring, and the higher stiffness of SiOx/COP stamps prevents the deformation during pressing. Finally, an example μCP is given to transfer titania precursor gel and produce TiO2 micropatterns on flexible polymer substrates. The SiOx/COP stamps and the μCP of TiO2 provide simple and cost-effective patterning techniques, which should contribute to the future design and creation of flexible devices
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|a Journal Article
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|a Utsunomiya, Toru
|e verfasserin
|4 aut
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|a Ichii, Takashi
|e verfasserin
|4 aut
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| 700 |
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|a Sugimura, Hiroyuki
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Langmuir : the ACS journal of surfaces and colloids
|d 1992
|g 36(2020), 37 vom: 22. Sept., Seite 10933-10940
|w (DE-627)NLM098181009
|x 1520-5827
|7 nnns
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| 773 |
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|g volume:36
|g year:2020
|g number:37
|g day:22
|g month:09
|g pages:10933-10940
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|u http://dx.doi.org/10.1021/acs.langmuir.0c01558
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