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231225s2020 xx |||||o 00| ||eng c |
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|a 10.1109/TUFFC.2020.3000055
|2 doi
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|a eng
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|a Dai, Sen
|e verfasserin
|4 aut
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|a Octave-Tunable Magnetostatic Wave YIG Resonators on a Chip
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|c 2020
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
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|a Date Revised 26.10.2020
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a We have designed, fabricated, and characterized magnetostatic wave (MSW) resonators on a chip. The resonators are fabricated by patterning single-crystal yttrium iron garnet (YIG) film on a gadolinium gallium garnet (GGG) substrate and excited by loop-inductor transducers. We achieved this technology breakthrough by developing a YIG film etching process and fabricating thick aluminum coplanar waveguide (CPW) inductor loop around each resonator to individually address and excite MSWs. At 4.77 GHz, the 0.68-mm2 resonator achieves a quality factor ( with a bias field of 987 Oe. We also demonstrate YIG resonator tuning by more than one octave from 3.63 to 7.63 GHz by applying an in-plane external magnetic field. The measured quality factor of the resonator is consistently over 3000 above 4 GHz. The micromachining technology enables the fabrication of multiple single- and two-port YIG resonators on the same chip with all resonators demonstrating octave tunability and high Q
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|a Journal Article
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|a Bhave, Sunil A
|e verfasserin
|4 aut
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|a Wang, Renyuan
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 67(2020), 11 vom: 21. Nov., Seite 2454-2460
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnns
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| 773 |
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|g volume:67
|g year:2020
|g number:11
|g day:21
|g month:11
|g pages:2454-2460
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|u http://dx.doi.org/10.1109/TUFFC.2020.3000055
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