Fabricating 3D Metastructures by Simultaneous Modulation of Flexible Resist Stencils and Basal Molds

Bibliographische Detailangaben
Veröffentlicht in:	Advanced materials (Deerfield Beach, Fla.). - 1998. - 32(2020), 36 vom: 01. Sept., Seite e2002570
1. Verfasser:	Cai, Hongbing (VerfasserIn)
Weitere Verfasser:	Meng, Qiushi, Chen, Qiang, Ding, Huaiyi, Dai, Yanmeng, Li, Sijia, Chen, Disheng, Tan, Qinghai, Pan, Nan, Zeng, Changgan, Qi, Zeming, Liu, Gang, Tian, Yangchao, Gao, Weibo, Wang, Xiaoping
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2020
Zugriff auf das übergeordnete Werk:	Advanced materials (Deerfield Beach, Fla.)
Schlagworte:	Journal Article 3D fabrication flexible resist stencils metallic spirals metastructures split-ring resonators

Beschreibung
Zusammenfassung:	© 2020 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Metamaterials have gained much attention thanks to their extraordinary and intriguing optical properties beyond natural materials. However, universal high-resolution fabrications of 3D micro/nanometastructures with high-resolution remain a challenge. Here, a novel approach to fabricate sophisticated 3D micro/nanostructures with excellent robustness and precise controllability is demonstrated by simultaneously modulating of flexible resist stencils and basal molds. This method allows arbitrary manipulations of morphology, size, and orientation, as well as contact angles of the objects. Combined with a new alignment strategy of high-resolution, previously inaccessible architectures are fabricated with ultrahigh precision, leading to an excellent spectra response from the fabricated metastructures. This method provides a new possibility to realize true 3D metamaterial fabrications featuring high-resolution and direct-compatibility with broad planar lithography platforms
Beschreibung:	Date Revised 07.12.2020 published: Print-Electronic Citation Status PubMed-not-MEDLINE
ISSN:	1521-4095
DOI:	10.1002/adma.202002570