Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer
This article presents a design of resonant cavity-based piezoelectric micromachined ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T) and Helmholtz resonant (HR) cavity-integrated PMUTs. In addition, equivalent circuit models for single PMUT cell and PMUT array are dev...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 10 vom: 12. Okt., Seite 2103-2118
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| 1. Verfasser: |
Xu, Tingzhong
(VerfasserIn) |
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| Weitere Verfasser: |
Zhao, Libo,
Jiang, Zhuangde,
Guo, Shuaishuai,
Li, Zhikang,
Yang, Ping,
Luo, Guoxi,
Sun, Lin,
Zhang, Liangchi |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2020
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
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