Two-Dimensional Plate Theory for the Analysis of Coupling Vibrations in Shear Mode FBARs
The shear mode film bulk acoustic wave resonators (FBARs) have been developed rapidly in recent years due to the increased interest in biosensors. In this article, the mode coupling effects that are unavoidable in real devices are theoretically analyzed and discussed. Mindlin's approximation me...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 9 vom: 01. Sept., Seite 1897-1908
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| 1. Verfasser: |
Li, Nian
(VerfasserIn) |
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| Weitere Verfasser: |
Wang, Bin,
Qian, Zhenghua,
Kuznetsova, Iren,
Ma, Tingfeng |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2020
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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