Perturbation Analysis of Nonlinearity in Radio-Frequency Bulk Acoustic Wave Resonators Using the Mass-Spring Model

This article describes derivation of an equivalent circuit for nonlinear responses in film bulk acoustic resonators from the first-order perturbation analysis using the piezoelectric constitutive equations with the h -form. For simplicity, electrodes and piezoelectric layers are considered as mass a...

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Publié dans:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 7 vom: 03. Juli, Seite 1479-1484
Auteur principal: Hashimoto, Ken-Ya (Auteur)
Autres auteurs: Li, Xinyi, Bao, Jingfu, Qiu, Luyan, Omori, Tatsuya
Format: Article en ligne
Langue:English
Publié: 2020
Accès à la collection:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:Journal Article