Perturbation Analysis of Nonlinearity in Radio-Frequency Bulk Acoustic Wave Resonators Using the Mass-Spring Model

This article describes derivation of an equivalent circuit for nonlinear responses in film bulk acoustic resonators from the first-order perturbation analysis using the piezoelectric constitutive equations with the h -form. For simplicity, electrodes and piezoelectric layers are considered as mass a...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 7 vom: 03. Juli, Seite 1479-1484
1. Verfasser: Hashimoto, Ken-Ya (VerfasserIn)
Weitere Verfasser: Li, Xinyi, Bao, Jingfu, Qiu, Luyan, Omori, Tatsuya
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2020
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article