Focused Ultrasound Assistance to the MOS Gas Sensor System

It is known that the ultrasound-assisted metal oxide semiconductor (MOS) gas sensor system can improve the sensitivity and lower detection limit (LDL) of a MOS gas sensor. The existing ultrasound-assisted MOS gas sensor system employs the standing-wave ultrasonic field. As the size of the sensing el...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 5 vom: 23. Mai, Seite 1009-1016
1. Verfasser: Su, Songfei (VerfasserIn)
Weitere Verfasser: Qi, Xiaomin, Liu, Pengzhan, Hu, Junhui
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2020
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, Non-U.S. Gov't