Focused Ultrasound Assistance to the MOS Gas Sensor System
It is known that the ultrasound-assisted metal oxide semiconductor (MOS) gas sensor system can improve the sensitivity and lower detection limit (LDL) of a MOS gas sensor. The existing ultrasound-assisted MOS gas sensor system employs the standing-wave ultrasonic field. As the size of the sensing el...
Ausführliche Beschreibung
Bibliographische Detailangaben
Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 5 vom: 23. Mai, Seite 1009-1016
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1. Verfasser: |
Su, Songfei
(VerfasserIn) |
Weitere Verfasser: |
Qi, Xiaomin,
Liu, Pengzhan,
Hu, Junhui |
Format: | Online-Aufsatz
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Sprache: | English |
Veröffentlicht: |
2020
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Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |