Suppression of Spurious Lateral Modes and Undesired Coupling Modes in Frame-Like FBARs by 2-D Theory

Thin-film bulk acoustic wave resonators (FBARs) are of significant interest for wireless applications due to their good performance. To achieve excellent characteristics, the frame-like FBARs were previously invented by researchers in this field to suppress the resonances of spurious lateral modes (...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 1 vom: 29. Jan., Seite 180-190
1. Verfasser: Li, Nian (VerfasserIn)
Weitere Verfasser: Wang, Bin, Qian, Zhenghua
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2020
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article