Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation
Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 [Formula: see text], a resonant frequency of ~8 MHz, and an operational...
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Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 66(2019), 10 vom: 08. Okt., Seite 1606-1615
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| 1. Verfasser: |
Cheng, Christopher Y
(VerfasserIn) |
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| Weitere Verfasser: |
Dangi, Ajay,
Ren, Liqiang,
Tiwari, Sudhanshu,
Benoit, Robert R,
Qiu, Yongqiang,
Lay, Holly S,
Agrawal, Sumit,
Pratap, Rudra,
Kothapalli, Sri-Rajasekhar,
Mallouk, Thomas E,
Cochran, Sandy,
Trolier-Mckinstry, Susan |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2019
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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