Frequency Spectra of Coupling Vibration in High-Frequency Thickness-Shear ZnO Thin Film Resonator Applied in Sensing Field Based on the Hamilton Principle
Mode coupling vibration of a multilayered ZnO thin film bulk acoustic wave resonator (FBAR) with its c-axis along the wave propagation direction operating at the fundamental thickness-shear (TSh) mode is studied in this paper. The accurate dispersion curve from 3-D piezoelectric theory indicates tha...
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Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 66(2019), 8 vom: 03. Aug., Seite 1331-1339
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| 1. Verfasser: |
Zhao, Zinan
(VerfasserIn) |
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| Weitere Verfasser: |
Wang, Bin,
Zhu, Jiaqi,
Qian, Zhenghua,
Huang, Bin |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2019
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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