Nanotribological Properties of ALD-Made Ultrathin MoS2 Influenced by Film Thickness and Scanning Velocity
Solid lubricating films are usually applied to reduce friction and adhesion of micro-/nano-electromechanical systems (MEMS/NEMS). Due to the special structure, MoS2 is endowed with excellent lubricity. Layer-controlled ultrathin MoS2 films with strong interactions to the underlying substrates were p...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 35(2019), 10 vom: 12. März, Seite 3651-3657 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | , , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2019
|
| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article |
| Online verfügbar |
Volltext |